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18202133329
Tape Frame FOUP Load Port
High reliability , well experienceLoad Port for 300mm is working in the front-end process in all over the world
Particle free① Original Door opening technology prevents particle penetration
② Low vibration design
SEMI standard conformityCID communication*option
Adaptor for open cassette is available*option
Supporting N2 purge function*option
Supporting various Tape Frame FOUP*Upon inquiry
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